SMIC Tests Domestic DUV Lithography for 7nm Chip Production
SMIC is reportedly testing a domestic 28nm DUV lithography machine with multi-patterning to produce 7nm chips, while a Shanghai state-backed enterprise begins manufacturing its own immersion DUV equipment.
2026-07-27 ~ 2026-07-28 · 3 related posts
- Episode 1: Rumors of China's Domestic DUV Mass Production Trigger ASML Plunge(2026-07-27, 3 posts)
- Episode 2: SMIC Tests Domestic DUV Lithography for 7nm Chip Production(2026-07-27, 3 posts)
- Episode 3: China Begins Mass Production of Domestic DUV Lithography Tools(2026-07-28, 4 posts)
- FT: SMIC is testing a Chinese-made 28nm DUV tool for 7nm chip production — teortaxesTex · 2026-07-27
- A new FT excerpt says DUV specs, not price, decide whether China’s tools can ship — teortaxesTex · 2026-07-27
- Report says a Shanghai-backed company has begun making domestic immersion DUV tools — teortaxesTex · 2026-07-28