FT: SMIC is testing a Chinese-made 28nm DUV tool for 7nm chip production
teortaxesTex · x · 2026-07-27
- FT reports that SMIC is testing a domestically made 28nm DUV lithography machine and combining it with multi-patterning techniques to produce 7nm chips.
- Early trial results are said to be promising, but it is still unclear when the machine can be used for mass production.
- Chinese chipmakers currently still rely heavily on ASML DUV tools bought before export controls or sourced second-hand.
- The article notes that new DUV tools usually need at least a year of tuning to reach production-grade stability and yields.
Related event: SMIC Tests Domestic DUV Lithography for 7nm Chip Production(3 posts)→
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