Report says a Shanghai-backed company has begun making domestic immersion DUV tools
teortaxesTex · x · 2026-07-28
Report says a Shanghai-backed company has started making domestic immersion DUV lithography tools
A quote in the post says a Shanghai state-backed company has begun manufacturing domestic immersion DUV lithography machines.
- The reported plan is 5 units this year and about 20 units in 2027.
- If the machines are qualified for production lines, the first hit would be ASML’s DUV business in China.
- The market reportedly repriced the risk quickly: ASML fell about 6.7%, LRCX about 6.7%, AMAT about 5.3%, and KLAC about 5.0%.
- The quoted take also notes that manufacturing the tool is only the first hurdle; throughput, overlay precision, reliability, and maintenance will determine how much of ASML’s China business can actually be replaced.
Related event: SMIC Tests Domestic DUV Lithography for 7nm Chip Production(3 posts)→
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