imec neural probe integrates photonics directly into 130nm CMOS backend
jwt0625 · x · 2026-11-04
The author highlights an imec optogenetics neural probe that extends the BEOL process directly on 130nm CMOS — no hybrid bonding — integrating OCS switches and grating couplers at dual wavelengths (450nm/638nm). Cross-sections show SiN waveguides, a light-blocking layer, and a 14-site shank with a thermo-optic switch matrix. He jokes the process is ahead of many optical-interconnect teams, and notes a CPO-like mirrored requirement: lasers are pushed external to avoid heating tissue.
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