Spiral Nd:YAG Waveguides (~100um) Carved via Ion Implantation, FIB and Wet Etch

jwt0625 · x · 2026-09-10

A hand-crafted spiral Nd:YAG optical waveguide (100 um diameter) built with a notably cursed fab process: carbon ion beam implantation creates a carbon-rich defect layer, FIB mills the waveguide shape down to it, then phosphoric acid etch and liftoff free the structure.

The author explains why smart-cut thin film wasn't used: earlier this year, smart-cut Nd:YAG films cracked from CTE mismatch during the annealing required for blistering-based exfoliation, making the implantation route the viable alternative.

Original post →

More from Research

Research channel →