Spiral Nd:YAG Waveguides (~100um) Carved via Ion Implantation, FIB and Wet Etch
jwt0625 · x · 2026-09-10
A hand-crafted spiral Nd:YAG optical waveguide (100 um diameter) built with a notably cursed fab process: carbon ion beam implantation creates a carbon-rich defect layer, FIB mills the waveguide shape down to it, then phosphoric acid etch and liftoff free the structure.
The author explains why smart-cut thin film wasn't used: earlier this year, smart-cut Nd:YAG films cracked from CTE mismatch during the annealing required for blistering-based exfoliation, making the implantation route the viable alternative.
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