Zero-Change Foundry-Compatible Silicon Photonics MEMS Optical Switch
jwt0625 · x · 2026-08-08
Shared a cool MEMS design that utilizes the BEOL metal layer for actuation. It requires absolutely zero changes to standard foundry processes.
However, the author noted that the etch time is quite long, taking about 2.5 hours.
Related event: UC Berkeley Unveils Zero-Change Silicon Photonic MEMS Switch(2 posts)→
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