UC Berkeley Unveils Zero-Change Silicon Photonic MEMS Switch

UC Berkeley introduced a silicon photonic MEMS optical switch driven by standard BEOL metal layers, requiring zero modifications to existing foundry processes, though it currently faces challenges such as longer etching times.

2026-08-08 ~ 2026-08-08 · 2 related posts

• Zero-Change Foundry-Compatible Silicon Photonics MEMS Optical Switch — jwt0625 · 2026-08-08
• UC Berkeley Unveils Zero-Change Foundry-Compatible Silicon Photonics MEMS Switch — jwt0625 · 2026-08-08