Physics-Informed ML for Semiconductor Epitaxy Control

bravo_abad · x · 2026-07-17

What the Research Did

This work proposes a physics-informed machine learning platform for semiconductor epitaxial growth called SemiEpi. The system reads real-time RHEED video during Molecular Beam Epitaxy (MBE) to decide online whether to increase temperature, maintain parameters, or close the growth window, achieving closed-loop control within a single growth run.

Methodology

The authors split the problem into two parts:

Results

The paper introduces three classifiers responsible for: surface reconstruction state initialization, detecting if the temperature is too high/low, and when to close the shutter. Validation accuracies reached 99.1%, 99.6%, and 99.9% respectively.

Experimental results showed samples approached the target quantum dot density of 5×10^10 cm^-2, photoluminescence intensity increased by 1.6x, and the linewidth was 29.13 meV. The authors emphasized that this method transfers across reactors because it relies on physical transitions rather than hardcoded device parameters.

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