Analyst speculates Chinese fabs use litho rework loophole to qualify domestic tools
pstAsiatech · x · 2026-11-10
The author argues semiconductor lithography's rare do-over — rework — creates a loophole: SMEE and Shanghai Aishengna may be working with domestic fabs to automate a loop of exposing production wafers on development tools, measuring results, then stripping and re-exposing on qualified ASML scanners, extracting real-world learning from tools fabs wouldn't otherwise trust with production.
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