China's First Domestic Front-end Lithography Tool Enters Production, Competing with 90s ASML

pstAsiatech · x · 2026-08-11

China's first domestic front-end lithography tool (AST6200) has entered production, breaking the long-standing monopoly of established players like ASML, Canon, and Nikon. However, industry observers note that its specifications fall somewhere between ASML's 275D and 100D models from the 1990s.

The new tool is expected to primarily compete against ASML's refurbished machine market. In contrast, ASML's latest i-line tools, such as the new 400M, feature significant productivity upgrades tailored for modern 300mm fabs, highlighting a considerable generational performance gap.

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