Shanghai Aishengna is said to be manufacturing DUV lithography tools
zephyr_z9 · x · 2026-07-29
Shanghai Aishengna is said to be manufacturing DUV tools, with the post linking it to Shanghai Electric, SMEE and a 2024 restructuring of SMEE into three units.
The attached image shows AMIES’s wafer-level advanced packaging lithography equipment, aimed at AI and advanced smart-terminal packaging such as FOWLP, FIWLP and 2.5D/3D. The poster also distinguishes responsibilities across the group: AMIES for back-end lithography, SMEE for KrF/i-line, and Aishengna for DUV work using SMEE patents and team members.
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