China’s domestic immersion DUV tools are moving toward 7nm chip production
deedydas · x · 2026-07-28
- The post claims China has started mass-producing its own immersion DUV lithography machine, described as a domestic equivalent to part of ASML’s stack.
- It says Yuliangsheng, linked to Huawei and SiCarrier, is making immersion DUV tools that can be used to produce 7nm chips, with first deliveries expected this year to SMIC, Hua Hong, and CXMT.
- The thread frames the Chinese AI compute stack as roughly ASML → Yuliangsheng, TSMC → SMIC, and Nvidia → Huawei, while noting that current tools are still years behind frontier EUV systems.
- It also adds caveats: dependence on Japanese components, long fab tuning cycles, and slow yield ramping, but argues the milestone matters for China’s long-term compute supply chain.
Related event: China Begins Mass Production of Domestic DUV Lithography Tools(4 posts)→
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